JPH0558064B2 - - Google Patents

Info

Publication number
JPH0558064B2
JPH0558064B2 JP30393587A JP30393587A JPH0558064B2 JP H0558064 B2 JPH0558064 B2 JP H0558064B2 JP 30393587 A JP30393587 A JP 30393587A JP 30393587 A JP30393587 A JP 30393587A JP H0558064 B2 JPH0558064 B2 JP H0558064B2
Authority
JP
Japan
Prior art keywords
chamber
vacuum
coil
welding
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP30393587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01142083A (ja
Inventor
Junichi Ogata
Hitoshi Ishizuka
Hiroshi Kagechika
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kokan Ltd filed Critical Nippon Kokan Ltd
Priority to JP62303935A priority Critical patent/JPH01142083A/ja
Publication of JPH01142083A publication Critical patent/JPH01142083A/ja
Publication of JPH0558064B2 publication Critical patent/JPH0558064B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP62303935A 1987-11-30 1987-11-30 連続式真空蒸着方法及び装置 Granted JPH01142083A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62303935A JPH01142083A (ja) 1987-11-30 1987-11-30 連続式真空蒸着方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62303935A JPH01142083A (ja) 1987-11-30 1987-11-30 連続式真空蒸着方法及び装置

Publications (2)

Publication Number Publication Date
JPH01142083A JPH01142083A (ja) 1989-06-02
JPH0558064B2 true JPH0558064B2 (en]) 1993-08-25

Family

ID=17927053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62303935A Granted JPH01142083A (ja) 1987-11-30 1987-11-30 連続式真空蒸着方法及び装置

Country Status (1)

Country Link
JP (1) JPH01142083A (en])

Also Published As

Publication number Publication date
JPH01142083A (ja) 1989-06-02

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